Transparent conducting Al-doped ZnO thin films prepared by magnetron sputtering with dc and rf powers applied in combination
- 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- 作者Minami, Tadatsugu; Ohtani, Yuusuke; Miyata, Toshihiro; Kuboi, Takeshi
- 卷第25卷
- 期第4期
- 印刷ISSN0734-2101
- 文件大小768.00KB
- 发表时间2007
- DOI10.1116/1.2748809
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