Feedforward correction of nonlinearities in piezoelectric scanner constructions and its experimental verification

• 期刊名称Review of Scientific Instruments
• 作者Graffel, B.; Müller, F.; Müller, A.-D.; Hietschold, M.
• 卷第78卷
• 期第5期
• 印刷ISSN0034-6748
• 文件大小812.72KB
• 发表时间2007
• DOI10.1063/1.2736786