[IEEE 2007 IEEE 19th International Conference on Indium Phosphide & Related Materials - Matsue, Japan (2007.05.14-2007.05.18)] 2007 IEEE 19th International Conference on Indium Phosphide & Related Materials - Quantum Well Intermixing in InGaAs/InGaAlAs Structures by Using ICP-RIE and SiO2 Sputtering
Chang, H. J.; Lin, E. Y.; Chuang, K. Y.; Chiu, C. L.; Lay, T. S.; Chang, T. Y.
- 作者Chang, H. J.; Lin, E. Y.; Chuang, K. Y.; Chiu, C. L.; Lay, T. S.; Chang, T. Y.
- 文件大小1673.56KB
- 发表时间2007
- DOI10.1109/iciprm.2007.381161
- 页码215-217