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Dielectric Films for Advanced Microelectronics || Low and Ultralow Dielectric Constant Films Prepared by Plasma-enhanced Chemical Vapor Deposition

Dielectric Films for Advanced Microelectronics || Low and Ultralow Dielectric Constant Films Prepared by Plasma-enhanced Chemical Vapor Deposition

Baklanov, Mikhail R.; Green, Martin L.; Maex, Karen

作者Baklanov, Mikhail R.; Green, Martin L.; Maex, Karen
文件大小1404.41KB
发表时间2007
DOI10.1002/9780470017944.ch1
页码1-32

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