Leaching mechanisms in immersion lithography with or without top coat

S. Gaugiran; R. Feilleux; C. Sourd; S. Warrick; V. Farys; D. Cruau; M. Benndorf; B. Mortini

作者S. Gaugiran; R. Feilleux; C. Sourd; S. Warrick; V. Farys; D. Cruau; M. Benndorf; B. Mortini
卷第84卷
印刷ISSN0167-9317
文件大小305.62KB
发表时间2007
DOI10.1016/j.mee.2007.01.117
页码1054-1057

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