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Effect of Wettability of Poly Silicon on CMP Behavior

Kang, Young-Jae; Kang, Bong-Kyun; Kim, In-Kwon; Park, Jin-Goo; Hong, Yi-Koan; Han, Sang-Yeob; Yun, Seong-Kyu; Yoon, Bo-Un; Hong, Chang-Ki

期刊名称MRS Proceedings
作者Kang, Young-Jae; Kang, Bong-Kyun; Kim, In-Kwon; Park, Jin-Goo; Hong, Yi-Koan; Han, Sang-Yeob; Yun, Seong-Kyu; Yoon, Bo-Un; Hong, Chang-Ki
卷第991卷
电子ISSN1946-4274
文件大小334.29KB
发表时间2007-1
DOI10.1557/PROC-0991-C09-06