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[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Post Cu-CMP Engineering Challenges for the 65 nm Technology Nodes and Beyond

[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Post Cu-CMP Engineering Challenges for the 65 nm Technology Nodes and Beyond

Petitdidier, Sebastien; Mellier, Maxime; Guiheux, Denis; Juhel, Marc

作者Petitdidier, Sebastien; Mellier, Maxime; Guiheux, Denis; Juhel, Marc
卷第11卷
文件大小704.67KB
发表时间2007
DOI10.1149/1.2779407
页码431-440

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