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Effects of substrate temperature on the microstructure and photoluminescence properties of ZnO thin films prepared by atomic layer deposition

Effects of substrate temperature on the microstructure and photoluminescence properties of ZnO thin films prepared by atomic layer deposition

Jongmin Lim; Chongmu Lee
  • 作者Jongmin Lim; Chongmu Lee
  • 卷第515卷
  • 印刷ISSN0040-6090
  • 文件大小1062.56KB
  • 发表时间2007
  • DOI10.1016/j.tsf.2006.09.007
  • 页码3335-3338
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