Production scale deposition of multilayer film structures for birefringent optical components
- 作者Markus K. Tilsch; Karen Hendrix; Kim Tan; David Shemo; Rick Bradley; Ralf Erz; Joerg Buth
- 卷第516卷
- 印刷ISSN0040-6090
- 文件大小433.79KB
- 发表时间2007
- DOI10.1016/j.tsf.2007.06.103
- 页码107-113