[AIP CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007 International Conference on Frontiers of Characterization and Metrology - Gaithersburg, MD (27-29 March 2007)] AIP Conference Proceedings - Investigation of Apertureless NSOM for Measurement of Stress in Strained Silicon-on-Insulator Test Structures
McDonough, Colin; Atesang, Jacob; Wang, Yunfei; Geer, Robert E.; Seiler, David G.; Diebold, Alain C.; McDonald, Robert; Garner, C. Michael; Herr, Dan; Khosla, Rajinder P.; Secula, Erik M.
- 作者McDonough, Colin; Atesang, Jacob; Wang, Yunfei; Geer, Robert E.; Seiler, David G.; Diebold, Alain C.; McDonald, Robert; Garner, C. Michael; Herr, Dan; Khosla, Rajinder P.; Secula, Erik M.
- 卷第931卷
- 文件大小1095.76KB
- 发表时间2007
- DOI10.1063/1.2799444
- 页码94-98