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Characterization of high density matrix microwave argon plasmas by laser absorption and electric probe diagnostics

Characterization of high density matrix microwave argon plasmas by laser absorption and electric probe diagnostics

Latrasse, L; Sadeghi, N; Lacoste, A; Bès, A; Pelletier, J

期刊名称Journal of Physics D: Applied Physics
作者Latrasse, L; Sadeghi, N; Lacoste, A; Bès, A; Pelletier, J
卷第40卷
期第17期
印刷ISSN0022-3727
电子ISSN1361-6463
文件大小323.87KB
发表时间2007-09-07
DOI10.1088/0022-3727/40/17/024
页码5177-5186

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