A deep micro-trench on silica glass fabricated by laserinduced backside wet etching (LIBWE)
Kawaguchi, Yoshizo; Niino, Hiroyuki; Sato, Tadatake; Narazaki, Aiko; Kurosaki, Ryozo
- 期刊名称Journal of Physics: Conference Series
- 作者Kawaguchi, Yoshizo; Niino, Hiroyuki; Sato, Tadatake; Narazaki, Aiko; Kurosaki, Ryozo
- 卷第59卷
- 印刷ISSN1742-6588
- 电子ISSN1742-6596
- 文件大小256.09KB
- 发表时间2007-04-01
- DOI10.1088/1742-6596/59/1/080
- 页码380-383