SPIE Proceedings [SPIE Integrated Optoelectronic Devices 2007 - San Jose, CA (Saturday 20 January 2007)] Physics and Simulation of Optoelectronic Devices XV - Quantum kinetic approach to electron-LO-phonon relaxation: Is there a phonon bottleneck problem in optoelectronic devices?
- 作者Gartner, P.; Osinski, Marek; Henneberger, Fritz; Seebeck, J.; Jahnke, F.; Arakawa, Yasuhiko
- 卷第6468卷
- 印刷ISSN0277-786X
- 文件大小360.62KB
- 发表时间2007
- DOI10.1117/12.717238
SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Optical Microlithography XXVIII - Advanced Mask Aligner Lithography (AMALITH)Lai, Kafai; Erdmann, Andreas; Voelkel, Reinhard; Vogler, Uwe; Bramati, Arianna · 2015
SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Optical Microlithography XXIII - Source mask optimization for advanced lithography nodesPoonawala, Amyn; Dusa, Mircea V.; Conley, Will; Stanton, William; Sawh, Chander · 2010
SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Optical Microlithography XXV - Advanced mask aligner lithography (AMALITH)Voelkel, Reinhard; Vogler, Uwe; Bramati, Arianna; Weichelt, Tina; Stuerzebecher, Lorenz; Zeitner, Uwe D.; Motzek, Kristian; Erdmann, Andreas; Hornung, Michael; Zoberbier, Ralph; Conley, Will · 2012
SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Extreme Ultraviolet (EUV) Lithography VI - Advanced coatings for next generation lithographyWood, Obert R.; Panning, Eric M.; Naujok, P.; Yulin, S.; Kaiser, N.; Tünnermann, A. · 2015
SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 24 February 2013)] Optical Microlithography XXVI - Inverse lithography technique for advanced CMOS nodesVillaret, Alexandre; Conley, Will; Tritchkov, Alexander; Entradas, Jorge; Yesilada, Emek · 2013
SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Extreme Ultraviolet (EUV) Lithography - Front Matter: Volume 7636La Fontaine, Bruno M.; SPIE, Proceedings of · 2010
SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Optical Microlithography XXVI - Zero expansion glass ceramic ZERODUR <sup>®</sup> roadmap for advanced lithographyWesterhoff, Thomas; Jedamzik, Ralf; Hartmann, Peter; Conley, Will · 2013
SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Optical Microlithography XXIII - <title>Selective inverse lithography methodology</title>Lim, ChinTeong; Temchenko, Vlad; Niehoff, Martin; Dusa, Mircea V.; Conley, Will · 2010