SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Canberra, ACT, Australia (Wednesday 5 December 2007)] Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV - Specialized hybrid batch fabrication process for MEMS RF voltage sensors
Tan, Hark Hoe; Dittmer, Jan; Judaschke, Rolf; Chiao, Jung-Chih; Faraone, Lorenzo; Büttgenbach, Stephanus; Jagadish, Chennupati; Williams, Jim; Wilson, Alan R.
- 作者Tan, Hark Hoe; Dittmer, Jan; Judaschke, Rolf; Chiao, Jung-Chih; Faraone, Lorenzo; Büttgenbach, Stephanus; Jagadish, Chennupati; Williams, Jim; Wilson, Alan R.
- 卷第6800卷
- 印刷ISSN0277-786X
- 文件大小1513.32KB
- 发表时间2007
- DOI10.1117/12.759425