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Properties of Inductively-Coupled Plasmas Driven by Multiple Low-Inductance Internal-Antenna Units

Properties of Inductively-Coupled Plasmas Driven by Multiple Low-Inductance Internal-Antenna Units

Kosuke Takenaka; Yuichi Setsuhara; Kazuaki Nishisaka; Akinori Ebe

作者Kosuke Takenaka; Yuichi Setsuhara; Kazuaki Nishisaka; Akinori Ebe
卷第4卷
印刷ISSN1612-8850
电子ISSN1612-8869
文件大小223.39KB
发表时间2007
DOI10.1002/ppap.200732318

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