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Plasma Profiles of Inductively Coupled Plasmas Sustained with Low-Inductance Internal Antenna

Plasma Profiles of Inductively Coupled Plasmas Sustained with Low-Inductance Internal Antenna

Kosuke Takenaka; Takashi Sera; Akinori Ebe; Yuichi Setsuhara

作者Kosuke Takenaka; Takashi Sera; Akinori Ebe; Yuichi Setsuhara
卷第4卷
印刷ISSN1612-8850
电子ISSN1612-8869
文件大小213.46KB
发表时间2007
DOI10.1002/ppap.200732319

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