Annealing of evaporated and sputtered niobium films in oxygen and nitrogen rich atmospheres by Rapid Thermal Processing (RTP)
Volha A. Matylitskaya; Oliver Brunkahl; Gerald Kothleitner; Wolfgang Bock; Bernd O. Kolbesen
- 作者Volha A. Matylitskaya; Oliver Brunkahl; Gerald Kothleitner; Wolfgang Bock; Bernd O. Kolbesen
- 卷第4卷
- 期第6期
- 印刷ISSN1610-1634
- 电子ISSN1610-1642
- 文件大小1054.94KB
- 发表时间2007
- DOI10.1002/pssc.200675231
- 页码1802-1816