Dielectric Films for Advanced Microelectronics || Integration Issues of High-k Gate Dielectrics
Baklanov, Mikhail R.; Green, Martin L.; Maex, Karen
- 作者Baklanov, Mikhail R.; Green, Martin L.; Maex, Karen
- 文件大小1091.59KB
- 发表时间2007
- DOI10.1002/9780470017944.ch10
- 页码437-451