Dielectric Films for Advanced Microelectronics || Porosity of Low Dielectric Constant Materials
Baklanov, Mikhail R.; Green, Martin L.; Maex, Karen
- 作者Baklanov, Mikhail R.; Green, Martin L.; Maex, Karen
- 文件大小4119.44KB
- 发表时间2007
- DOI10.1002/9780470017944.ch3
- 页码85-136