High-cycle fatigue of micromachined single crystal silicon measured using a parallel fatigue test system
- 期刊名称IEICE Electronics Express
- 作者Ikehara, Tsuyoshi; Tsuchiya, Toshiyuki
- 卷第4卷
- 期第9期
- 电子ISSN1349-2543
- 文件大小262.63KB
- 发表时间2007
- DOI10.1587/elex.4.288
- 页码288-293
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