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Focused Ion Beam Systems (Basics and Applications) || Gas assisted ion beam etching and deposition

Focused Ion Beam Systems (Basics and Applications) || Gas assisted ion beam etching and deposition

Yao, Nan
  • 作者Yao, Nan
  • 期第3期
  • 文件大小758.65KB
  • 发表时间2007
  • DOI10.1017/CBO9780511600302.004
  • 页码67-86
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