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Future Trends in Microelectronics || Atomically Controlled Processing for Future Si-Based Devices

Future Trends in Microelectronics || Atomically Controlled Processing for Future Si-Based Devices

Luryi, Serge; Xu, Jimmy; Zaslavsky, Alex

作者Luryi, Serge; Xu, Jimmy; Zaslavsky, Alex
文件大小1506.74KB
发表时间2007
DOI10.1002/9780470168264.ch22
页码246-258

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