Self-assembly of three dimensional micro mechanisms using thermal shrinkage of polyimide

• 作者Kenji Suzuki; Hideaki Yamada; Hirofumi Miura; Hideaki Takanobu
• 卷第13卷
• 印刷ISSN0946-7076
• 电子ISSN1432-1858
• 文件大小434.37KB
• 发表时间2007-05
• DOI10.1007/s00542-006-0303-z
• 页码1047-1053