Deposition by magnetron sputtering and characterization of indium tin oxide thin films
- 作者A.V. Mudryi; A.V. Ivaniukovich; A.G. Ulyashin
- 卷第515卷
- 期第16期
- 印刷ISSN0040-6090
- 文件大小417.08KB
- 发表时间2007
- DOI10.1016/j.tsf.2006.11.113
- 页码6489-6492
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