GaBi alloy liquid metal ion source for microelectronics research
- 作者L. Bischoff; W. Pilz; Th. Ganetsos; R.G. Forbes; Ch. Akhmadaliev
- 卷第107卷
- 期第9期
- 印刷ISSN0304-3991
- 文件大小176.23KB
- 发表时间2007
- DOI10.1016/j.ultramic.2007.02.022
- 页码865-868
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