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Effects of hydrogen content in sputtering ambient on ZnO:Al electrical properties

Effects of hydrogen content in sputtering ambient on ZnO:Al electrical properties

Joel N. Duenow; Timothy A. Gessert; David M. Wood; David L. Young; Timothy J. Coutts
  • 作者Joel N. Duenow; Timothy A. Gessert; David M. Wood; David L. Young; Timothy J. Coutts
  • 卷第354卷
  • 印刷ISSN0022-3093
  • 文件大小156.90KB
  • 发表时间2008
  • DOI10.1016/j.jnoncrysol.2007.10.070
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