Two-Axis Microstage System
- 期刊名称Journal of Microelectromechanical Systems
- 作者Beverly, P.; Sivakumar, G.; Dallas, T.
- 卷第17卷
- 期第4期
- 印刷ISSN1057-7157
- 电子ISSN1941-0158
- 文件大小805.21KB
- 发表时间2008-08
- DOI10.1109/JMEMS.2008.921713
- 页码863-868
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