Chemical mechanical polishing and nanomechanics of semiconductor CdZnTe single crystals

• 期刊名称Semiconductor Science and Technology
• 作者Zhang, Zhenyu; Gao, Hang; Jie, Wanqi; Guo, Dongming; Kang, Renke; Li, Yan
• 卷第23卷
• 期第10期
• 印刷ISSN0268-1242
• 电子ISSN1361-6641
• 文件大小1894.85KB
• 发表时间2008-10-01
• DOI10.1088/0268-1242/23/10/105023