Detection of a Formate Surface Intermediate in the Atomic Layer Deposition of High-κ Dielectrics Using Ozone
- 期刊名称Chemistry of Materials
- 作者Kwon, Jinhee; Dai, Min; Halls, Mathew D.; Chabal, Yves J.
- 卷第20卷
- 期第10期
- 印刷ISSN0897-4756
- 电子ISSN1520-5002
- 文件大小531.74KB
- 发表时间2008-05
- DOI10.1021/cm703667h
- 页码3248-3250
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