A novel noria (water-wheel-like cyclic oligomer) derivative as a chemically amplified electron-beam resist material
Kudo, Hiroto; Watanabe, Daisuke; Nishikubo, Tadatomi; Maruyama, Ken; Shimizu, Daisuke; Kai, Toshiyuki; Shimokawa, Tsutomu; Ober, Christopher K.
- 期刊名称Journal of Materials Chemistry
- 作者Kudo, Hiroto; Watanabe, Daisuke; Nishikubo, Tadatomi; Maruyama, Ken; Shimizu, Daisuke; Kai, Toshiyuki; Shimokawa, Tsutomu; Ober, Christopher K.
- 卷第18卷
- 期第30期
- 印刷ISSN0959-9428
- 电子ISSN1364-5501
- 文件大小499.84KB
- 发表时间2008
- DOI10.1039/b805394d