Resonant Interferometric Lithography beyond the Diffraction Limit
- 期刊名称Physical Review Letters
- 作者Kiffner, M.; Evers, J.; Zubairy, M. S.
- 卷第100卷
- 期第7期
- 印刷ISSN0031-9007
- 电子ISSN1079-7114
- 文件大小271.95KB
- 发表时间2008-2-19
- DOI10.1103/PhysRevLett.100.073602
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