Structural properties of nitrogenated amorphous carbon films: Influence of deposition temperature and radiofrequency discharge power

• 期刊名称Journal of Applied Physics
• 作者Lazar, G.; Bouchet-Fabre, B.; Zellama, K.; Clin, M.; Ballutaud, D.; Godet, C.
• 卷第104卷
• 期第7期
• 印刷ISSN0021-8979
• 文件大小546.93KB
• 发表时间2008
• DOI10.1063/1.2951622