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Diffusion and activation of n-type dopants in germanium

Koike, Masahiro; Kamata, Yoshiki; Ino, Tsunehiro; Hagishima, Daisuke; Tatsumura, Kosuke; Koyama, Masato; Nishiyama, Akira

期刊名称Journal of Applied Physics
作者Koike, Masahiro; Kamata, Yoshiki; Ino, Tsunehiro; Hagishima, Daisuke; Tatsumura, Kosuke; Koyama, Masato; Nishiyama, Akira
卷第104卷
期第2期
印刷ISSN0021-8979
文件大小716.37KB
发表时间2008
DOI10.1063/1.2958326