W chemical-vapor deposition using (i-C[sub 3]H[sub 7]C[sub 5]H[sub 4])[sub 2]WH[sub 2]
Ogura, Atsushi; Imai, Satoshi; Kagawa, Taihei; Kurozaki, Hirotaka; Ishikawa, Masato; Muramoto, Ikuyo; Machida, Hideaki; Ohshita, Yoshio
- 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- 作者Ogura, Atsushi; Imai, Satoshi; Kagawa, Taihei; Kurozaki, Hirotaka; Ishikawa, Masato; Muramoto, Ikuyo; Machida, Hideaki; Ohshita, Yoshio
- 卷第26卷
- 期第4期
- 印刷ISSN0734-2101
- 文件大小458.22KB
- 发表时间2008
- DOI10.1116/1.2913581