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The correlation between pentatomic and heptatomic carbon rings and stress of hydrogenated amorphous carbon films prepared by dc-pulse plasma chemical vapor deposition

The correlation between pentatomic and heptatomic carbon rings and stress of hydrogenated amorphous carbon films prepared by dc-pulse plasma chemical vapor deposition

Wang, Qi; Wang, Chengbing; Wang, Zhou; Zhang, Junyan; He, Deyan

期刊名称Applied Physics Letters
作者Wang, Qi; Wang, Chengbing; Wang, Zhou; Zhang, Junyan; He, Deyan
卷第93卷
期第13期
印刷ISSN0003-6951
文件大小524.68KB
发表时间2008
DOI10.1063/1.2996273

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