发现好书期刊，享受阅读乐趣

海量图书期刊资源，随时随地畅享阅读乐趣

A low temperature fabrication of HfO[sub 2] films with supercritical CO[sub 2] fluid treatment

Tsai, Chih-Tsung; Chang, Ting-Chang; Kin, Kon-Tsu; Liu, Po-Tsun; Yang, Po-Yu; Weng, Chi-Feng; Huang, Fon-Shan

期刊名称Journal of Applied Physics
作者Tsai, Chih-Tsung; Chang, Ting-Chang; Kin, Kon-Tsu; Liu, Po-Tsun; Yang, Po-Yu; Weng, Chi-Feng; Huang, Fon-Shan
卷第103卷
期第7期
印刷ISSN0021-8979
文件大小912.71KB
发表时间2008
DOI10.1063/1.2844496