![Simultaneous quantitative determination of the distribution of dopants in silicon by high mass resolution secondary ion mass spectrometry]()
Simultaneous quantitative determination of the distribution of dopants in silicon by high mass resolution secondary ion mass spectrometryStingeder, Gerhard.; Piplits, Kurt.; Gara, Stefan.; Grasserbauer, Manfred.; Budil, Matthias.; Poetzl, Hans. · Analytical Chemistry · 1989