Characteristics of La2O3 thin films deposited using metal organic chemical vapor deposition with different oxidant gas
- 作者Hyo June Kim; Jin Hyung Jun; Doo Jin Choi
- 卷第34卷
- 期第4期
- 印刷ISSN0272-8842
- 文件大小402.34KB
- 发表时间2008
- DOI10.1016/j.ceramint.2007.09.071
- 页码953-956
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