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[IEEE 2008 IEEE Ultrasonics Symposium (IUS) - Beijing, China (2008.11.2-2008.11.5)] 2008 IEEE Ultrasonics Symposium - Temperature compensation of thin AlN film resonators utilizing the lowest order symmetric lamb mode

[IEEE 2008 IEEE Ultrasonics Symposium (IUS) - Beijing, China (2008.11.2-2008.11.5)] 2008 IEEE Ultrasonics Symposium - Temperature compensation of thin AlN film resonators utilizing the lowest order symmetric lamb mode

Wingqvist, G.; Arapan, L.; Yantchev, V.; Katardjiev, I.

作者Wingqvist, G.; Arapan, L.; Yantchev, V.; Katardjiev, I.
文件大小1679.17KB
发表时间2008
DOI10.1109/ultsym.2008.0291
页码1207-1210

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