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Etching characteristics and absence of electrical properties damage of PZT thin films etched before crystallization

Etching characteristics and absence of electrical properties damage of PZT thin films etched before crystallization

R.H. Liang; D. Rémiens; C. Soyer; N. Sama; X.L. Dong; G.S. Wang

作者R.H. Liang; D. Rémiens; C. Soyer; N. Sama; X.L. Dong; G.S. Wang
卷第85卷
期第4期
印刷ISSN0167-9317
文件大小407.99KB
发表时间2008
DOI10.1016/j.mee.2007.12.031
页码670-674

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