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Redistribution of dopant, implanted in a multilayer structure for production of a -junction, during annealing radiative defects

Redistribution of dopant, implanted in a multilayer structure for production of a -junction, during annealing radiative defects

E.L. Pankratov
  • 作者E.L. Pankratov
  • 卷第372卷
  • 期第11期
  • 印刷ISSN0375-9601
  • 文件大小171.96KB
  • 发表时间2008
  • DOI10.1016/j.physleta.2007.10.058
  • 页码1897-1903
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