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USJ Dopant Bleaching and Device Effects in Advanced Microelectronic Plasma Enhanced Resist Strip Processing

USJ Dopant Bleaching and Device Effects in Advanced Microelectronic Plasma Enhanced Resist Strip Processing

Wirbeleit, Frank; Grimm, Volker; Krüger, Christian; Streck, Christoph; Sonnemans, Roger; Berry, Ivan
  • 期刊名称MRS Proceedings
  • 作者Wirbeleit, Frank; Grimm, Volker; Krüger, Christian; Streck, Christoph; Sonnemans, Roger; Berry, Ivan
  • 卷第1070卷
  • 电子ISSN1946-4274
  • 文件大小942.15KB
  • 发表时间2008-1
  • DOI10.1557/PROC-1070-E01-12
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