USJ Dopant Bleaching and Device Effects in Advanced Microelectronic Plasma Enhanced Resist Strip Processing
Wirbeleit, Frank; Grimm, Volker; Krüger, Christian; Streck, Christoph; Sonnemans, Roger; Berry, Ivan
- 期刊名称MRS Proceedings
- 作者Wirbeleit, Frank; Grimm, Volker; Krüger, Christian; Streck, Christoph; Sonnemans, Roger; Berry, Ivan
- 卷第1070卷
- 电子ISSN1946-4274
- 文件大小942.15KB
- 发表时间2008-1
- DOI10.1557/PROC-1070-E01-12