Optical Detection of SiN Stress Layer Induced Carrier Mobility Enhancement in Silicon
- 期刊名称MRS Proceedings
- 作者Wirbeleit, Frank; Pedrero, Victoria; Thron, Dominik; Stephan, Rolf; Schwalke, Udo
- 卷第1074卷
- 电子ISSN1946-4274
- 文件大小325.92KB
- 发表时间2008-1
- DOI10.1557/PROC-1074-I03-11
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