Relationship Between Residual Stress and Crystallographic Structure in Ga-Doped ZnO Film
- 期刊名称Journal of The Electrochemical Society
- 作者Yamamoto, Naoki; Yamada, Takahiro; Miyake, Aki; Makino, Hisao; Kishimoto, Seiichi; Yamamoto, Tetsuya
- 卷第155卷
- 期第9期
- 印刷ISSN0013-4651
- 文件大小1191.45KB
- 发表时间2008
- DOI10.1149/1.2945912
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