Optimum structure of metal oxide under-layer used in Ag-based multilayer
- 作者Kazuhiro Kato; Hideo Omoto; Atsushi Takamatsu
- 卷第83卷
- 期第3期
- 印刷ISSN0042-207X
- 文件大小672.70KB
- 发表时间2008
- DOI10.1016/j.vacuum.2008.04.025
- 页码606-609
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