[ECS 213th ECS Meeting - Phoenix, AZ (May 18 - May 23, 2008)] ECS Transactions - Practical Gate-First Metal Gate/Dual High-k CMOS Integration with Low Threshold Voltages
- 作者Nara, Yasuo; Mise, Nobuyuki; Kadoshima, Masaru; Morooka, Tetsu; Kamiyama, Satoshi; Matsuki, Takeo; Sato, Motoyuki; Ono, Tetsuo; Aoyama, Takayuki; Eimori, Takahisa; Ohji, Yuzuru
- 卷第13卷
- 文件大小764.45KB
- 发表时间2008
- DOI10.1149/1.2937590
- 页码209-218
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