SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 24 February 2008)] Design for Manufacturability through Design-Process Integration II - Automatic hotspot classification using pattern-based clustering
Ma, Ning; Ghan, Justin; Mishra, Sandipan; Spanos, Costas; Poolla, Kameshwar; Rodriguez, Norma; Capodieci, Luigi; Singh, Vivek K.; Rieger, Michael L.
- 作者Ma, Ning; Ghan, Justin; Mishra, Sandipan; Spanos, Costas; Poolla, Kameshwar; Rodriguez, Norma; Capodieci, Luigi; Singh, Vivek K.; Rieger, Michael L.
- 卷第6925卷
- 印刷ISSN0277-786X
- 文件大小330.43KB
- 发表时间2008
- DOI10.1117/12.772867