Thermal conductivity of Si/SiGe superlattice films
- 作者C. Liu; C. Yu; H. Chien; S. Kuo; C. Hsu; M. Dai; G. Luo; S. Huang; M. Huang
- 文件大小1083.80KB
- 发表时间2008
- DOI10.1063/1.3032602
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