SPIE Proceedings [SPIE MOEMS-MEMS 2008 Micro and Nanofabrication - San Jose, CA (Saturday 19 January 2008)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII - Front Matter: Volume 6884
- 作者SPIE, Proceedings of; Hartzell, Allyson L.; Ramesham, Rajeshuni
- 卷第6884卷
- 印刷ISSN0277-786X
- 文件大小328.54KB
- 发表时间2008
- DOI10.1117/12.791928
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