![[IEEE IEEE International Symposium on Micro-NanoMechatronics and Human Science, 2005 - Nagoya University, Japan (Nov. 7, 2005)] IEEE International Symposium on Micro-NanoMechatronics and Human Science, 2005 - Microfabrication and characterization of evolutionary mems resonators]()
[IEEE IEEE International Symposium on Micro-NanoMechatronics and Human Science, 2005 - Nagoya University, Japan (Nov. 7, 2005)] IEEE International Symposium on Micro-NanoMechatronics and Human Science, 2005 - Microfabrication and characterization of evolutionary mems resonatorsKamalian, R.; Ying Zhang, ; Agogino, A.M. · 2005